The Snomipede: A Parallel Platform for Scanning Near-Field Photolithography

Research output: Contribution to journalArticle

  • External authors:
  • Ehtsham ul-Haq
  • Zhuming Liu
  • Yuan Zhang
  • Shahrul A Alang Ahmad
  • Jamie K Hobbs
  • Graham J Leggett
  • Clive J Roberts
  • John M R Weaver
  • Clive R Roberts

Bibliographical metadata

Original languageEnglish
Pages (from-to)2997-3008
JournalJ. Mater. Res.
Volume26
DOIs
Publication statusPublished - 2011