2D materials have attracted tremendous research interest since the isolation of graphene. Their remarkable optical, electronic, and mechanical properties hold great potential across a range of technological applications. As a result, there is a growing demand for low cost, low energy, and high-resolution lithography methods that will enable the integration of 2D materials in complex integrated circuitry, biomedical devices, and the generation of quantum-confined nanostructures. Recent advances in scanning probe nanolithography (SPL) techniques for the (nano)lithography of 2D materials such as graphene, black phosphorus, molybdenum disulfide, and tungsten diselenide are discussed herein; including the various physiochemical aspects of subtractive and additive lithography of these 2D materials. Examples of 2D material-based devices that are fabricated by SPL and their properties are also
described. The comparative advantages of the individual SPL techniques are discussed along with the future outlook of SPL on 2D materials.