Direct-write scanning probe lithography: Towards a desktop fab

Research output: Contribution to journalArticle

  • External authors:
  • Louise R. Giam
  • Andrew J. Senesi
  • Xing Liao
  • Jinan Chai
  • Daniel J. Eichelsdoerfer
  • Wooyoung Shim
  • Boris Rasin
  • Shu He
  • Chad A. Mirkin

Abstract

Massively parallel scanning-probe based methods have been used to address the challenges of nanometer to millimeter scale printing for a variety of materials and mark a step towards the realization of a "desktop fab." Such tools enable simple, flexible, high-throughput, and low-cost nano- and microscale patterning, which allow researchers to rapidly synthesize and study systems ranging from nanoparticle synthesis to biological processes. We have developed a novel scanning probe-based cantilever-free printing method termed polymer pen lithography (PPL), which uses an array of elastomeric tips to transfer materials (e.g. alkanethiols, proteins, polymers) in a direct-write manner onto a variety of surfaces. This technique takes the best attributes of dip-pen nanolithography (DPN) and eliminates many of the disadvantages of contact printing. Various related techniques such as beam pen lithography (BPL), scanning probe block copolymer lithography (SPBCL), and hard-tip, soft spring lithography (HSL) are also discussed. © 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).

Bibliographical metadata

Original languageEnglish
Article number803103
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume8031
DOIs
Publication statusPublished - 2011