AACVD of Molybdenum Sulfide and Oxide Thin Films From Molybdenum(V)-based Single-source Precursors

Research output: Contribution to journalArticle

  • Authors:
  • Nicky Savjani
  • Jack R Brent
  • Paul O'Brien

Bibliographical metadata

Original languageEnglish
Pages (from-to)71-77
Number of pages7
JournalChemical Vapor Deposition
Volume21
Issue number1-3
DOIs
StatePublished - 2015